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Axio Imager Vario from ZEISS with New Hardware Auto Focus and Cleanroom Kit

Axio Imager Vario from ZEISS with New Hardware Auto Focus and Cleanroom Kit

More speed and precision for in-process inspection

Jena/Stuttgart, Germany, 14 May 2013


At the 2013 Control international trade fair for quality assurance, ZEISS presented its new Hardware Auto Focus and cleanroom kit for the proven Axio Imager Vario microscope system.

An integratable autofocus system ensures fast and precise focusing. The Hardware Auto Focus is ideal for surface inspections on reflective, low-contrast samples. In transmitted and reflected light (brightfield, darkfield, polarization contrast and oblique illumination), the focus system ensures high precision down to 0.3 of the depth of field of the objective lens. The sensor registers changes to the focus position and automatically and quickly compensates any deviations via direct access to the Z drive of the microscope. As a result, even large samples such as monitors and solar panels in XY direction remain constantly in the focus of the observer. The Hardware Auto Focus works ideally with ZEISS AxioVision software and is fully integrated in modules such as MosaiX for automated overview image capture.

Axio Imager Vario is certified for cleanroom use in accordance with DIN EN ISO 14644-1 and, with the cleanroom kit, fulfills the requirements of ISO 5, the most commonly used cleanroom class. This corresponds to the original FED STD 209E (1992) standard of class 100. Extensive accessories such as the 7x turret with particle protection and sneeze guard ensure that samples such as wafers and photomasks are clean at all times.

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